HIGH TECH SERVICES repairs and rebuilds Applied Materials heated chuck assemblies. We offer several repair options to choose from including reface of the chuck, bellows replacement, or a complete rebuild. The complete rebuild includes new heaters and wiring, new thermocouples, replacement of bellows, re-tap screws, resurface faceplate and replacement of water lines and fittings. After the chuck is rebuilt we helium leak check the finished chuck to 1x10-9 SCCM and then have the chuck cleaned and packaged for shipment.  


Reface $500.00
Bellows Replacement $1,800.00
Complete Rebuild $5,500.00





2006 Copyright® by High Tech Services Inc.