Varian Pressure Plate Repair

High Tech Services repairs and manufactures all styles of Varian pressure plates used in four, five, and six inch sputtering machines. The repairs may be as simple as fixing a leaking line or broken screw or it may involve a complete rebuild. A rebuild of the pressure plate includes cleaning of the main wheel, replacing of copper plates and water line assemblies, and the replacement of the outer pads. After the main repairs are made the assembly is helium leak tested to 2x10-9 SCCM, cleaned and double bagged in Nitrogen. High Tech Services Inc. can also provide a new pressure plate assembly.


General Repairs (per hour)
Complete Rebuilding
New Assembly






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