Sputtering Cathode Repairs

High Tech Services repairs and tests cathode assemblies that are used in MRC and Perkin-Elmer sputtering systems. These repairs consists of the following:

  • Backing Plate --  clean out threads and broken screws, resurface O-ring seals, resolder leaking water channels, rethread water ports and replate with electroless nickel.
  • Anode Ring --  Straighten and repair anode rings, clean or replace insulators and replace O-rings.
  • Cathode Assembly --  Bright dip all components, regauss or replace the magnets, reassemble in a clean room atmosphere and test the magnetic field pattern. We then double bag the cathode assembly in a dry nitrogen atmosphere.

 

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