Tech Services repairs and tests cathode assemblies
that are used in MRC and Perkin-Elmer sputtering systems.
These repairs consists of the following:
Backing Plate -- clean out
threads and broken screws, resurface O-ring seals, resolder
leaking water channels, rethread water ports and replate
with electroless nickel.
Anode Ring -- Straighten
and repair anode rings, clean or replace insulators and
Cathode Assembly -- Bright
dip all components, regauss or replace the magnets, reassemble
in a clean room atmosphere and test the magnetic field
pattern. We then double bag the cathode assembly in a
dry nitrogen atmosphere.