High
Tech Services repairs and tests cathode assemblies
that are used in MRC and Perkin-Elmer sputtering systems.
These repairs consists of the following:
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Backing Plate -- clean out
threads and broken screws, resurface O-ring seals, resolder
leaking water channels, rethread water ports and replate
with electroless nickel.
-
Anode Ring -- Straighten
and repair anode rings, clean or replace insulators and
replace O-rings.
-
Cathode Assembly -- Bright
dip all components, regauss or replace the magnets, reassemble
in a clean room atmosphere and test the magnetic field
pattern. We then double bag the cathode assembly in a
dry nitrogen atmosphere.
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