The Lam Chamber redesign was created due to a process change
by our customer that was causing the anodized aluminum chamber
to fail prematurely. The exposed portion of the mid chamber
was breaking down and causing particulate failure of the wafers.
Because of the failure of the mid chamber the equipment down
time and maintenance had increased to a weekly occurrence.
We studied the problem and the design of the chamber and came
up with a solution. We remachined the mid chamber and designed
a ceramic liner to replace the failing area. We also redesigned
the oring seal to allow for easier installation and better
Chamber cleaning went from weekly to monthly and chamber replacement
was not necessary. Over a period of one year this upgrade
saved the customer in excess of $50,000 dollars in parts and
maintenance costs and millions of dollars in lost product.