Perkin Elmer Parts and Services

System Rebuilding

System Upgrades
  • Table Feedthru
  • RF Generator (tuning network)
  • Computer System
  • Precision Table Drive
  • Cryo-Regeneration Controller
  • Turbo Pumped Load Lock
  • Chamber Roughing Valves
  • Load Lock Roughing Valves
  • Chamber Hi-Vac Valve
  • Chamber Throttle Valve Conversion
  • Delta to 8'' Adapter
  • Load Lock Heaters
  • Delta Heater Assembly
  • 8'' Heater Assembly
Component Repair
  • Table Assembly
  • Table Feedthru
  • Delta Cathode Backing Plates
  • Delta Anode Rings
  • 8'' DC Magnetron Backing Plate
  • 8'' RF Backing Plate
  • J Arm Rebuild
  • L Arm Rebuild
Components
  • Insulators
  • Shield Sets
  • Load Lock Controller
  • Pump Down Controller

 

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