FEATURES

SST frame and panels
Interior mirror finish
PLC process control
Variable flow N2 purge
Digital temperature control
Temperature to 350C
Thermocouple vacuum gauge
Vacuum to 10-8 Torr
Safety interlocked
Dimensions 36"w x 60"h x 36"d


 

 

 

The Model 2424 Vacuum Oven is designed for the purpose of processing components under low levels of vacuum and at elevated temperatures. Processing under low levels of vacuum greatly decreases the possibility of oxygen or other airborne components from contaminating your product. All stainless steel components and assemblies ensure contaminate-free processing. Internal fusion welding of the chamber and related components provides for vacuum integrity to below 10-8 torr. Internal IR radiant heating elements minimize the energy used to heat the components and produce ramp up rates in excess of 100C per minute. The vacuum chamber dimensions are 24" diameter x 24'' deep. With the standard array the heat zone is 18" diameter x 20" long and has a temperature uniformity of less than 1% deviation. Some of the applications include metal contact annealing, flat panel bake out, outgassing of ceramics and metals, precleaning of sputter and implant components, passivation, and vacuum curing.
 

 

 

OPTIONS

Data acquisition and control
Direct drive mechanical pump
High vacuum to 10 - 6 Torr
High temperature to 500C
Internal configuration
Quartz viewport
FACILITIES

208 VAC 30 Amp
10 PSI dry nitrogen
70 PSI air


 

 

 

Description of Options

Data acquisition and control
This option is a PC-based data acquisition and control system that give user unlimited process control over temperature ramping, pumping and purging. this system stores all pertinent process information for data logging and tracking.
 
Pump Package
The option package includes a 27 cfm direct drive, two-stage mechanical pump, exhaust mist eliminator, inlet sieve trap, and all associated plumbing components for proper installation.
 
High Vacuum Pump
the high vacuum option consists of a high vacuum gauge, an 400 L/S turbo pump, turbo controller and the necessary plumbing to decrease the base pressure to the low 10-6 range.
 
High Temperature
The high temperature option increases the heating in the chamber and the insulation to enable bake outs at 500C.
 
Internal Configuration
The internal shelving or fixturing can be custom designed to fit the needs of the application. This option will be priced on request.


 

 

 

Price
Model 2424 Oven
$34,295
Data Acquisition
$14,300
Pump Package 27 cfm
$5,220
High Vacuum Pump
$17,800
High Temperature
$4,800